Probe apparatus and method for correcting contact position

ABSTRACT

A probe apparatus includes a movable mounting table for supporting an object to be tested; a probe card disposed above the mounting table and having a plurality of probes to come into contact with electrodes of the object; a support body for supporting the probe card; and a control unit for controlling the mounting table. Electrical characteristics of the object are tested based on a signal from a tester by bringing the object and the probes into electrical contact with each other by overdriving the mounting table in a state where a test head is electrically connected with the probe card by a predetermined load. Further, one or more distance measuring devices for measuring a current overdriving amount of the mounting table are provided at one or more locations of the test head or the probe card.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of pending U.S. application Ser. No.12/466,107, filed on May 14, 2009, the entire content of which isincorporated herein by reference, and claims priority under 35 U.S.C.§119 to Japanese Patent Application No. 2008-128145 filed May 15, 2008.

FIELD OF THE INVENTION

The present invention relates to a probe apparatus for testingelectrical characteristics of an object to be processed such as asemiconductor wafer or the like; and, more particularly, to a probeapparatus capable of bringing probes of a probe card into electricalcontact with an object to be tested on a mounting table with apredetermined overdriving amount and a method for correcting a contactposition.

BACKGROUND OF THE INVENTION

As shown in, e.g., FIG. 6, a conventional probe apparatus includes: anapparatus main body 1; a mounting table 2 provided in the apparatus mainbody 1 to mount thereon an object to be tested (e.g., a semiconductorwafer) W, the mounting table 2 being movable in X, Y, Z and θ direction;a probe card 3 having a plurality of probes 3A to be brought intocontact with electrode pads of a plurality of devices formed on thesemiconductor wafer W mounted on the mounting table 2; a fixingmechanism 4 for fixing the probe card 3 via a card holder (not shown);and a connection ring 5 for electrically connecting the probe card 3 anda test head T. This conventional probe apparatus is configured to testelectrical characteristics of each device by transmitting and receivingtest signals between a tester (not shown) and the electrode pads of eachdevice formed on the semiconductor wafer W via the test head T, theconnection ring 5 and the probe card 3. Moreover, in FIG. 6, a referencenumeral ‘6’ indicates a mechanism for position-aligning thesemiconductor wafer W and the probe card 3 in cooperation with themounting table 2; a reference numeral ‘6A’ represents an upper camera; areference numeral ‘6B’ denotes a lower camera; and a reference numeral‘7’ indicates a head plate to which the fixing mechanism 4 of the probecard 3 is attached.

In order to test the semiconductor wafer W, tip positions of the probes3A are detected by the lower camera 6B of the alignment mechanism 6, andpositions of the electrode pads of the wafer W which correspond to theprobes 3A of the probe card 3 are detected by the upper camera 6A. Next,the alignment between the semiconductor wafer W and the probe card 3 isperformed and, then, the mounting table 2 is raised to bring thesemiconductor wafer W and the probes 3A into contact with each other.Thereafter, the semiconductor wafer W and the probes 3A are brought intoelectrical contact with each other by overdriving the mounting table 2,and the test of the semiconductor wafer W is carried out.

Although the probe card 3 is electrically connected with the test head Tvia the connection ring 5, the probe card 3 is lowered due to a load ofthe test head T and, hence, a central portion of the head plate 7 whichforms an interface mechanism with respect to the tester is slightlydeformed, as illustrated in FIG. 7A.

Further, during the test of the semiconductor wafer W, the alignmentbetween the electrode pads of the semiconductor wafer W and the probes3A corresponding thereto is performed by the alignment mechanism 6 and,then, the mounting table 2 is raised to bring the semiconductor wafer Winto contact with the probe card 3. Further, the semiconductor wafer Wand the probes 3A are brought into electrical contact with each other byoverdriving the mounting table 2. At this time, the probe card 3 isslightly raised by the mounting table 2 and, accordingly, the centralportion of the head plate 7 is deformed upward, as depicted in FIG. 7B.

By overdriving the mounting table 2, the head plate 7 is deformed from aposition shown in a left half side of FIG. 7C to a position shown in aright half side of FIG. 7C. As a consequence, the probe card 3 isdisplaced upward by, e.g., about 10 to 20% of the overdriving amount.For that reason, an originally intended overdriving amount (e.g., about100 μm) may not be accurately applied to the mounting table 2 and, also,a good electrical contact state may not be guaranteed, which maydeteriorate the reliability of the test. Especially, when test isperformed in a state where the probes 3A of the probe card 3 arerequired to be brought into contact with respectively correspondingdevices of the semiconductor wafer W all at once, the deformation of thehead plate 7 can affect the test greatly.

As for a technique related to an overdriving, there are suggestedtechniques disclosed in, e.g., Patent Documents 1 to 4. In the techniqueof Patent Document 1, there is provided an optical length-measuring unitfor measuring vertical displacement of a probe card. A lifting amount ofa mounting table is adjusted based on a displacement of the probe cardobtained by the optical length-measuring unit, and the semiconductorwafer and the probe card are brought into contact with each other by aproper overdriving amount. In the technique of Patent Document 2, anoverdriving amount of a mounting table can be appropriately set byaccurately detecting displacement of a probe card deformed byoverdriving the mounting table. Further, in the technique of PatentDocument 3, an overdriving amount of a mounting table is controlledbased on a result obtained by measuring a height of a thermally deformedprobe card by a sensor. All of these techniques attempt to obtain aproper overdriving amount by considering influence of the deformation ofthe probe card or the lowering of the mounting table, but cannot copewith the case where the interface mechanism including the probe card orthe head plate is deformed during the test. Furthermore, in a techniqueof Patent Document 4, a predetermined overdriving amount is obtained bybringing a stopper provided at a mounting table into contact with aprobe card. However, in this technique, a weight of the mounting tablemay increase.

-   [Patent Document 1] Japanese Patent Laid-open Publication No.    2004-265895-   [Patent Document 2] Japanese Patent Laid-open Publication No.    2003-050271-   [Patent Document 3] Japanese Patent Laid-open Publication No.    2003-168707-   [Patent Document 4] Japanese Patent Laid-open Publication No.    2005-049254

SUMMARY OF THE INVENTION

In view of the above, the present invention provides a probe apparatuscapable of performing highly reliable test by bringing a plurality ofprobes of a probe card into contact with an object to be processed withan optimum overdriving amount obtained by correcting an overdrivingamount of a mounting table to become same as an originally intendedoverdriving amount despite deformation of an interface mechanism duringtest, and a method for correcting a contact position.

In accordance with an embodiment of the present invention, there isprovided a probe apparatus including: a movable mounting table forsupporting an object to be tested; a probe card disposed above themounting table and having a plurality of probes to come into contactwith electrodes of the object; a support body for supporting the probecard; and a control unit for controlling the mounting table, whereinelectrical characteristics of the object are tested based on a signalfrom a tester by bringing the object and the probes into electricalcontact with each other by overdriving the mounting table in a statewhere a test head is electrically connected with the probe card by apredetermined load, and wherein one or more distance measuring devicesfor measuring a current overdriving amount of the mounting table areprovided at one or more locations of the test head or the probe card,and the control unit compares the current overdriving amount with apreset overdriving amount and corrects the current overdriving amount tobecome same as the preset overdriving amount based on the comparisonresult.

Preferably, the distance measuring devices are laser beam distancemeasuring device for measuring a distance by using laser beam.

It is preferred that the distance measuring devices are provided at thetest head, and each include a first measuring unit for measuring adistance to a top surface of the object on the mounting table and asecond measuring unit for measuring a distance to a top surface of theprobe card.

Preferably, the control unit or the tester calculates as a firstdistance a difference between a distance measured by the first measuringunit and a distance measured by the second measuring unit when theobject on the mounting table starts to contact with the probes, andcalculates as a second distance a difference between a distance measuredby the first measuring unit and a distance measured by the secondmeasuring unit when the mounting table is overdriven.

Further, the control unit may calculate as the current overdrivingamount the difference between the first distance and the seconddistance.

Preferably, the distance measuring devices are provided at the probecard, and each includes a proximity sensor for measuring a distance to atop surface of the object.

It is preferred that the control unit calculates as the currentoverdriving amount the difference between a first distance measured bythe distance measuring devices when the object on the mounting tablestarts to contact with the probes and a second distance measured by thedistance measuring devices when the mounting table is overdriven.

In accordance with another embodiment of the present invention, there isprovided a probe apparatus including: a movable mounting table forsupporting an object to be tested; a probe card disposed above themounting table and having a plurality of probes to come into contactwith electrodes of the object; a support body for supporting the probecard through a fixing mechanism; and a control unit for controlling themounting table, wherein electrical characteristics of the object aretested based on a signal from a tester by bringing the object and theprobes into electrical contact with each other by overdriving themounting table in a state where a test head is electrically connectedwith the probe card by a predetermined load, and wherein one or moredistance measuring devices for measuring a current overdriving amount ofthe mounting table are provided at one or more locations of the mountingtable, and the control unit compares the current overdriving amount witha preset overdriving amount and corrects the current overdriving amountto become same as the preset overdriving amount based on the comparisonresult.

It is preferred that the distance measuring devices are a laser beammeasuring device for measuring a distance by using laser beam.

Preferably, the distance measuring devices measure as a first distance adistance to the fixing mechanism when the object on the mounting tablestarts to contact with the probes, and also measures as a seconddistance a distance to the fixing mechanism when the mounting table isoverdriven.

In accordance with still another embodiment of the present invention,there is provided a method for correcting a contact position bycorrecting an overdriving amount of a mounting table to become same as apreset overdriving amount while electrical characteristics of an objectto be tested on the mounting table are tested by bringing the objectinto electrical contact with a plurality of probes of a probe card byoverdriving the mounting table, the method including: bringing theobject on the mounting table into contact with the probes of the probecard; calculating a current overdriving amount in overdriving themounting table; comparing the current overdriving amount with the presetoverdriving amount; and correcting the current overdriving amount tobecome same as the preset overdriving amount based on the comparisonresult.

It is preferred that the step of calculating the current overdrivingamount includes: calculating as a first distance a difference between adistance to a top surface of the object and a distance to the probe cardwhen the object on the mounting table starts to contact with the probes;calculating as a second distance a difference between a distance to thetop surface of the object and a distance to the probe card when themounting table is overdriven; and calculating as the current overdrivingamount a difference between the first distance and the second distance.

Preferably, the step of calculating the current overdriving amountincludes: calculating as a first distance a distance to a top surface ofthe object when the object on the mounting table starts to contact withthe probes; calculating as a second distance a distance to the topsurface of the object when the mounting table is overdriven; andcalculating as the current overdriving amount a difference between thefirst distance and the second distance.

Further, the step of calculating the current overdriving amount mayinclude: calculating as a first distance a distance to a fixing unit ofthe probe card when the object on the mounting table starts to contactwith the probes; calculating as a second distance a distance to thefixing unit of the probe card when the mounting table is overdriven; andcalculating as the current overdriving amount a difference between thefirst distance and the second distance.

In accordance with the present invention, it is possible to provide aprobe apparatus capable of performing highly reliable test by bringing aplurality of probes of a probe card into contact with an object to beprocessed by an optimum overdriving amount obtained by correcting anoverdriving amount of a mounting table to become same as an originallyintended overdriving amount despite deformation of an interfacemechanism during test, and a method for correcting a contact position.

BRIEF DESCRIPTION OF THE DRAWINGS

The other objects and features of the present invention will becomeapparent from the following description of embodiments, given inconjunction with the accompanying drawings, in which:

FIGS. 1A and 1B show an embodiment of a probe apparatus of the presentinvention, wherein FIG. 1A describes a relationship between the probeapparatus and a tester, and FIG. 1B depicts a relationship among a testhead, a distance measuring device and a connection ring;

FIG. 2 provides a cross sectional view of main parts of the apparatus ina state where a plurality of probes are brought into contact with asemiconductor wafer on a mounting table of the probe apparatus of FIG.1, wherein a left half side thereof presents a state where thesemiconductor wafer and the probe card start to come into contact witheach other, and a right half side thereof represents a state where themounting table is overdriven;

FIG. 3 provides a block diagram illustrating a relationship between adistance measuring device of a probe apparatus in accordance withanother embodiment of the present invention and a control unit of theprobe apparatus;

FIG. 4 offers a cross sectional view of main parts of a probe apparatusin accordance with still another embodiment of the present invention,which corresponds to FIG. 2;

FIGS. 5A to 5C set forth flow charts showing the sequence of stepsperformed until a semiconductor wafer and a plurality of probes arebrought into contact with each other by using a probe apparatus inaccordance with still another embodiment of the present invention;

FIG. 6 provides a front view obtained by cutting out a part of anexemplary conventional probe apparatus; and

FIGS. 7A to 7C illustrate flow charts showing the sequence of stepsperformed until a semiconductor wafer and a plurality of probes arebrought into electrical contact with each other by using theconventional probe apparatus of FIG. 6.

DETAILED DESCRIPTION OF THE EMBODIMENT

Hereinafter, embodiments of the present invention will be described withreference to FIGS. 1 to 5C. FIGS. 1A and 1B show an embodiment of aprobe apparatus of the present invention, wherein FIG. 1A describes arelationship between the probe apparatus and a tester, and FIG. 1Bdepicts a relationship among a test head, a distance measuring deviceand a connection ring. FIG. 2 provides a cross sectional view of mainparts of the apparatus in a state where a plurality of probes arebrought into contact with a semiconductor wafer on a mounting table ofthe probe apparatus of FIG. 1, wherein a left half side thereof presentsa state where the semiconductor wafer and the probe card start to comeinto contact with each other, and a right half side thereof represents astate where the mounting table is overdriven. FIG. 3 provides a blockdiagram illustrating a relationship between a distance measuring deviceof a probe apparatus in accordance with another embodiment of thepresent invention and a control unit of the probe apparatus. FIG. 4offers a cross sectional view of main parts of a probe apparatus inaccordance with another embodiment of the present invention, whichcorresponds to FIG. 2. FIGS. 5A to 5C set forth flow charts showing thesequence of steps performed until a semiconductor wafer and a pluralityof probes are brought into contact with each other by using a probeapparatus in accordance with still another embodiment of the presentinvention.

First Embodiment

As shown in, e.g., FIGS. 1A and 1B, a probe apparatus of the firstembodiment includes: a mounting table 11 capable of moving in an X, Y, Zand θ direction, for mounting thereon an object to be tested (e.g., asemiconductor wafer) W; a driving mechanism 12 for moving the mountingtable 11 in X, Y and Z directions; a probe card disposed above themounting table 11 and having a plurality of probes 13A to be broughtinto contact with electrodes of the object to be tested; a support body(head plate) 15 for supporting a fixing mechanism 14 of the probe card13; a control unit 16 for controlling various components including themounting table 11. In this probe apparatus, the mounting table 11 isoverdriven to bring the semiconductor wafer W into electrical contactwith the probes 13A by a predetermined load in a state where a test head18 is electrically connected with the probe card 13 via a connectionring 17, and the electrical characteristics of the semiconductor wafer Ware tested based on a signal from a tester 20. Besides, although it isnot illustrated, as in the conventional probe apparatus, an alignmentmechanism is provided at the probe apparatus 10.

Moreover, the load of the test head 18 is applied to the probe card 13during the test, so that the probe card 13 and the fixing mechanism 14of the interface mechanism with respect to the tester 20 (including theprobe card 13, the fixing mechanism 14 and the head plate 15) arelowered toward the mounting table 11, as shown in FIG. 1A. Subsequently,a central portion of the head plate 15 is slightly deformed downward.

As can be seen from FIG. 1A, the probe card 13 is formed with a diameterslightly larger than that of the semiconductor wafer W, and has aplurality of probes 13A corresponding to electrode pads of all devicesof the semiconductor wafer W over a substantially entire surfacethereof. During the test, the probes 13A are brought into contact withrespectively corresponding electrode pads formed on the semiconductorwafer W all at once, and then brought into electrical contact with thesemiconductor wafer W by a preset overdriving amount. During a singlecontact, all of the devices formed on the semiconductor wafer W aretested sequentially. Therefore, when the probe card 13 and thesemiconductor wafer W are brought into contact with each other at onceunder the control of the control unit 16, a heavy contact load isapplied between the probe card 13 and the semiconductor wafer W on themounting table 11. Due to this contact load, the probe card 13 israised, and the central portion of the head plate 15 as the interfacemechanism is slightly deformed upward. Accordingly, an originallyintended predetermined overdriving amount cannot be obtained.

Thus, in this embodiment, a current overdriving amount is measured byusing distance measuring devices. Specifically, distance measuringdevices 19 are provided inside the test head 18 as shown in FIGS. 1A and1B, and are configured to measure a distance to a top surface of a boardof the probe card 13 and a distance to a top surface of thesemiconductor wafer W in a state where the semiconductor wafer W and theprobes 13A of the probe card 13 are brought into contact with eachother. In this embodiment, the distance measuring devices 19 areprovided at, e.g., seven locations including a central portion of thetest head 18 and six other locations surrounding the central portion.The distance measuring devices 19 are e.g., laser beam distancemeasuring devices. As illustrated in FIGS. 1A and 1B, each of thedistance measuring devices 19 includes a first measuring unit formeasuring a distance to the top surface of the semiconductor wafer W byirradiating laser beam L1 to the top surface of the semiconductor waferW on the mounting table 11 and a second measuring unit for measuring adistance to a top surface of the probe card 13 by irradiating laser beamL2 to the top surface of the probe card 13. The signals measured by thefirst and the second measuring unit are transmitted to the tester 20,and a difference between the distances measured by the first and thesecond measuring unit is calculated by the tester 20. By uniformlydistributing the seven distance measuring device 19 at seven locations,distances to substantially entire surface of the semiconductor wafer Wcan be measured. Further, through holes through which the laser beamfrom the second measuring unit passes are formed in the board of theprobe card 13. In FIG. 1A, for convenience, the distances measured bythe laser beam irradiated from the first and the second measuring unitare indicated as L1 and L2, respectively.

As illustrated in FIG. 1A, the control unit 16 includes a centralprocessing unit 16A, a program storage unit 16B storing therein variousprograms and a storage unit 16C for storing therein various data, and isconfigured to control various devices such as the mounting table 11 andthe like. The program storage unit 16B stores therein a program forexecuting a method for correcting a contact position of the presentinvention. This program is read out and executed by the centralprocessing unit 16A. Moreover, the storage unit 16C stores therein anoriginally intended preset overdriving amount.

During the test, the mounting table 11 is raised by a predetermineddistance under the control of the control unit 16, and the semiconductorwafer W is brought into contact with all the probes 13A of the probecard 13 at once. When the semiconductor wafer W starts to contact withthe probes 13A, the distance measuring devices 19 measure, under thecontrol of the tester 20, the distance L1 to the top surface of thesemiconductor wafer W by using the first measuring unit and also measurethe distance L2 to the top surface of the probe card 13 by using thesecond measuring unit. The measured signals are transmitted to thetester 20. The tester 20 calculates as a first distance ΔZ1 a differencebetween the distance L1 and the distance L2 based on the measuredsignals, and then transmits this value to the central processing unit16A of the control unit 16 of the probe apparatus 10.

Further, the mounting table 11 is overdriven based on the presetoverdriving amount under the control of the control unit 16 of themounting table 11. Due to the contact load at this time, the mountingtable 11 raises the probe card 13 and the fixing mechanism 14 from thestate shown in the left half side of FIG. 2. As a consequence, thecentral portion of the head plate 15 as the interface mechanism isdeformed to thereby result in a state shown in the right half side ofFIG. 2. When the mounting table 11 is overdriven, the distance measuringdevices 19 measure, under the control of the tester 20, a distance L1′to the top surface of the semiconductor wafer W by using the firstmeasuring unit, and also measure a distance L2′ to the top surface ofthe probe card 14 by using the second measuring unit. The measuredsignals are transmitted to the tester 20. The tester 20 calculates as asecond distance ΔZ2 a difference between the distance L1′ and thedistance L2′ based on the measured signals, and transmits this value tothe central processing unit 16A of the control unit 16 of the probeapparatus 10.

In the control unit 16, a difference ΔZ (=ΔZ1−ΔZ2) between the firstdistance LZ1 and the second distance LZ2 is calculated as a currentoverdriving amount of the mounting table 11 and, then, the currentoverdriving amount is compared with the preset overdriving amount. Basedon the comparison result, the mounting table 11 is driven to correct thecurrent overdriving amount of the mounting table 11 to become same asthe preset overdriving amount. Accordingly, the semiconductor wafer Wand the probes 13A are brought into contact with each other by theoriginally intended preset overdriving amount, and the electricalcharacteristics of the semiconductor wafer W are tested under an optimumcontact load.

Hereinafter, an embodiment of a method for correcting a contact positionby using the probe apparatus 10 will be explained. When thesemiconductor wafer W is mounted on the mounting table 11, the alignmentmechanism is driven to align the semiconductor wafer W with the probecard 13 under the control of the control unit 16. Upon completion of thealignment, the mounting table 11 moves in X and Y directions and stopswhen the semiconductor wafer W is positioned directly below the centerof the probe card 13.

Next, the mounting table 11 is raised by a predetermined distance, andthe electrode pads of all of the devices of the semiconductor wafer Ware brought into contact with the respectively corresponding probes 13Aof the probe card 13 all at once, as can be seen from the left half sideof FIG. 2. At this time, the distance measuring devices 19 operate, andthe first and the second measuring unit measure the distances L1 and L2.The measured values are transmitted to the tester 20. In the tester 20,the difference between the distances L1 and L2 is calculated as thefirst distance ΔZ1. Further, as shown in the right side of FIG. 2, themounting table 11 is overdriven, so that the probe card 13 is raised bythe mounting table 11. Accordingly, the central portion of the headplate 15 of the interface mechanism is deformed. In this state, thedistances L1′ and L2′ obtained after the overdriving are respectivelymeasured by the first and the second measuring unit of the distancemeasuring devices 19. The measured values are transmitted to the tester20. In the tester 20, the difference between the distances L1′ and L2′is calculated as the second distance ΔZ2. The tester 20 transmits thefirst and the second distance ΔZ1 and ΔZ2 to the control unit 16 of theprobe apparatus 10.

In the control unit 16, the central processing unit 16A calculates as acurrent overdriving amount the difference ΔZ between the first distanceΔZ1 and the second distance ΔZ2 and, then, the current overdrivingamount is compared with a preset overdriving amount read from thestorage unit 16C. The control unit 16 corrects the current overdrivingamount to become same as the preset overdriving amount based on thecomparison result. When the mounting table 11 is controlled to be drivenby the preset overdriving amount by the control unit 16, thesemiconductor wafer W and the probes 13A are brought into electricalcontact with each other by an originally intended contact load. In thisstate, electrical characteristics of the devices of the semiconductorwafer W are tested sequentially based on the signal from the tester 20.Upon completion of the test, the mounting table 11 is lowered to areference position and, then, the semiconductor wafer W is replaced witha next semiconductor wafer W. Thereafter, the next semiconductor wafer Wis tested in the same sequence as described above.

As set forth above, in accordance with this embodiment, the distancemeasuring devices 19 for measuring a current overdriving amount areprovided at seven locations of the test head 18. Further, the controlunit 16 compares the current overdriving amount with a presetoverdriving amount, and corrects the current overdriving amount tobecome same as the preset overdriving amount based on the comparisonresult. Thus, even when the current overdriving amount is not equal tothe preset overdriving amount due to deformation of the interfacemechanism of the probe apparatus 10 which is caused by a load of thetest head 18 and that from the mounting table 11 during the overdriving,the current overdriving amount ΔZ is accurately detected by the distancemeasuring devices 19 provided at the seven locations, and is correctedto become same as an originally intended preset overdriving amount bythe control unit 16 based on the detection result. Hence, thesemiconductor wafer W and the probes 13A are brought into electricalcontact with each other at once by an optimum contact load constantly,which makes it possible to perform highly reliable test.

In addition, in accordance with this embodiment, the distance measuringdevices 19 are provided at the seven locations of the test head 18, andeach of the distance measuring devices 19 includes the first measuringunit for measuring a distance to a top surface of the semiconductorwafer W on the mounting table 11 and the second measuring unit formeasuring a distance to the top surface of the probe card 13. In thetester 20, the difference between the distance L1 measured by the firstmeasuring unit and the distance L2 measured by the second measuring unitwhen the semiconductor wafer W on the mounting table 11 starts to comeinto contact with the probes 13A is calculated as the first distanceΔZ1, and the difference between a distance L1′ measured by the firstmeasuring unit and a distance L2′ measured by the second measuring unitwhen the mounting table 11 is overdriven is calculated as the seconddistance ΔZs. Further, the control unit 16 calculates as the currentoverdriving amount the difference ΔZ between the first distance ΔZ1 andthe second distance ΔZ2, so that the current overdriving amount can beaccurately detected constantly.

Second Embodiment

As shown in FIG. 3, a probe apparatus 10A of the second embodiment has asubstantially same configuration as that of the first embodiment exceptthat signals measured by the distance measuring devices 19 aretransmitted to the control unit 16 of the probe apparatus 10A.Therefore, hereinafter, the probe apparatus 10A of this embodiment willbe described by using like reference numerals for like or correspondingparts identical to those of the first embodiment. FIG. 3 is a blockdiagram showing configurations of main parts of the probe apparatus 10A.

The distance measuring devices 19 used here are the same as those of thefirst embodiment. In the first embodiment, the signals measured by thedistance measuring devices 19 are transmitted to the tester 20. However,in this embodiment, the measurement signals are transmitted to thecontrol unit 16, and the first and the second distance ΔZ1 and ΔZ2 arecalculated in the control unit 16. Next, as in the first embodiment, thecontrol unit 16 calculates as a current overdriving amount thedifference ΔZ between the first and the second distance ΔZ1 and ΔZ2, andcompares the current overdriving amount with a preset overdrivingamount. Based on the comparison result, the current overdriving amountis corrected to become same as the preset overdriving amount.Accordingly, in this embodiment, the same operational effects as thoseof the first embodiment can be obtained and, also, it is possible toobtain the effect in which the measurement result of the distancemeasuring devices 19 can be processed in the probe apparatus 10Aregardless of the tester 20.

Third Embodiment

As illustrated in FIG. 4, a probe apparatus 10B of this embodiment has asubstantially same configuration as that of the first embodiment exceptthat distance measuring devices 19A different from those of the firstembodiment are provided at the probe card 13. Therefore, hereinafter,the probe apparatus 10B of this embodiment will be described by usinglike reference numerals for like or corresponding parts identical tothose of the first embodiment.

In this embodiment, the distance measuring devices 19A are formed of,e.g., an ultrasonic proximity sensor, an eddy current proximity sensoror the like. In this embodiment as well, laser beam distance measuringdevices can be used as the distance measuring devices 19A. The distancemeasuring devices 19A are provided at a central portion of the probecard 13 and, e.g., six locations surrounding the central portion.

The distance measuring devices 19A measure as the first distance Z1 adistance from the distance measuring devices 19A to the top surface ofthe semiconductor wafer W when the mounting table 11 is raised by apredetermined distance and the semiconductor wafer W starts to come intocontact with the probes 13A, and also measure as the second distance Z2a distance from the distance measuring devices 19A to the top surface ofthe semiconductor wafer W when the mounting table 11 is overdriven.

When the mounting table 11 is overdriven, the probe card 13 is slightlydisplaced due to the deformation of the interface mechanism from thestate shown in the left half side of FIG. 4 to the state shown in theright half side of FIG. 4 as in the first embodiment. However, thedistance between the distance measuring devices 19A and thesemiconductor wafer W can be accurately measured without being affectedby the displacement of the probe card 13.

After the first and the second distance Z1 and Z2 are measured by thedistance measuring devices 19A, the measurement signals are transmittedto the control unit 16. When the control unit 16 receives themeasurement signals, a difference ΔZ (=Z1−Z2) between the first distanceZ1 and the second distance Z2 is calculated as a current overdrivingamount, and the current overdriving amount is compared with a presetoverdriving amount. Based on the comparison result, the currentoverdriving amount is corrected to become same as the preset overdrivingamount.

Therefore, when the contact position correcting method of the presentembodiment is performed under the control of the control unit 16, thesemiconductor wafer W on the mounting table 11 is brought into contactwith the probes of the probe card, and the distance measuring devices19A measure, the first distance Z1 from the distance measuring devices19A to the top surface of the semiconductor wafer W when thesemiconductor wafer W on the mounting table 11 starts to contact withthe probes. The measurement value is transmitted to the control unit 16.Next, the mounting table 11 is overdriven, and the distance measuringdevices 19A measure the second distance Z2 from the distance measuringdevice 19A to the top surface of the semiconductor wafer W uponcompletion of the overdriving. The measurement value is transmitted tothe control unit 16. The control unit 16 calculates as a currentoverdriving amount the difference ΔZ between the first distance Z1 andthe second distance Z2 and, then, the current overdriving amount iscompared with the preset overdriving amount. Based on the comparisonresult, the current overdriving amount is corrected to become same asthe preset overdriving amount. Thereafter, the test of the semiconductorwafer W is carried out in the same manner described in the firstembodiment.

In this embodiment as well, the same operational effects as those of thefirst embodiment can be obtained.

Fourth Embodiment

As illustrated in FIGS. 5A to 5C, a probe apparatus 10C of the fourthembodiment has a substantially same configuration as that of the firstembodiment except that distance measuring devices 19B are provided at abase 11A for supporting the mounting table 11. Hence, hereinafter, theprobe apparatus 10C of this embodiment will be described by using likereference numerals for like or corresponding parts identical to those ofthe first embodiment.

The distance measuring devices 19B measure, when the mounting table 11is raised by a predetermined distance from the state shown in FIG. 5Aand the semiconductor wafer W starts to come into contact with theprobes 13A as depicted in FIG. 5B, as the first distance Z1 a distancefrom the distance measuring devices 19A to the bottom surface of thefixing mechanism 14, and also measure, when the overdriving of themounting table 11 is completed as illustrated in FIG. 5C, as the seconddistance Z2 a distance from the distance measuring devices 19A to thebottom surface of the fixing mechanism 14. Even if the probe card 13 israised by the mounting table 11 from the state shown in FIGS. 5A and 5Bto the state shown in FIG. 5C during the overdriving and thus thecentral portion of the head plate 15 is deformed, the fixing mechanism14 is raised together with the probe card 13. Therefore, the distance tothe bottom surface of the fixing mechanism 14 is not affected by thedeformation of the head plate 15. In other words, even if the probe card13 is slightly displaced upward, the fixing mechanism 14 is raisedtogether with the probe card 13 and, hence, it is possible to accuratelymeasure the distance between the distance measuring device 19B and thebottom surface of the fixing mechanism 14.

After the distance measuring devices 19B measure the first and thesecond distance Z1 and Z2 as described above, the measured signals aretransmitted to the control unit 16. When the control unit 16 receivesthe measurement signals, a difference ΔZ (=Z1−Z2) between the firstdistance Z1 and the second distance Z2 is calculated as a currentoverdriving amount, and the current overdriving amount is compared withthe preset overdriving amount. Based on the comparison result, thecurrent overdriving amount is corrected to become same as the presetoverdriving amount.

Therefore, when the contact position correcting method of the presentembodiment is performed under the control of the control unit 16, thesemiconductor wafer W on the mounting table 11 is brought into contactwith the probes 13A of the probe card 13, and the distance measuringdevices 19B measure the first distance Z1 to the bottom surface of thefixing mechanism 14 when the semiconductor wafer W on the mounting table11 starts to contact with the probes. The measurement value istransmitted to the control unit 16. Next, the mounting table 11 isoverdriven, and the distance measuring devices 19A measure the seconddistance to the bottom surface of the fixing mechanism 14 uponcompletion of the overdriving. The measurement value is transmitted tothe control unit 16. The control unit 16 calculates as a currentoverdriving amount the difference ΔZ between the first distance Z1 andthe second distance Z2, and compares the current overdriving amount witha predetermined overdriving amount. Based on the comparison result, thecurrent overdriving amount is corrected to become same as thepredetermined overdriving amount. The test of the semiconductor wafer Wis performed in the same manner described in the first embodiment.

In this embodiment as well, the operational effects same as those of thefirst embodiment can be obtained.

The present invention is not limited to the above-described embodiments,and the constituent elements can be appropriately modified as necessary.For example, although the above embodiments have been described for thecase where the semiconductor wafer W and the probe card 13 are broughtinto contact with each other at once over the entire surface, thepresent invention can also be applied to the case where the probes ofthe probe card come into contact with a limited part of the devicesformed on the semiconductor wafer. Further, the object to be tested maybe an LCD substrate or the like, other than the semiconductor wafer.

The present invention can be preferably used for a probe apparatus.

While the invention has been shown and described with respect to theembodiments, it will be understood by those skilled in the art thatvarious changes and modification may be made without departing from thescope of the invention as defined in the following claims.

1. A probe apparatus comprising: a movable mounting table for supportingan object to be tested; a probe card disposed above the mounting tableand having a plurality of probes to come into contact with electrodes ofthe object; a support body for supporting the probe card; and a controlunit for controlling the mounting table, wherein electricalcharacteristics of the object are tested based on a signal from a testerby bringing the object and the probes into electrical contact with eachother by overdriving the mounting table in a state where a test head iselectrically connected with the probe card by a predetermined load,wherein one or more distance measuring devices for measuring a currentoverdriving amount of the mounting table are provided at one or morelocations of the test head or the probe card, and the control unitcompares the current overdriving amount with a preset overdriving amountand corrects the current overdriving amount to become same as the presetoverdriving amount based on the comparison result, and wherein thedistance measuring devices are provided at the probe card, and eachinclude a proximity sensor for measuring a distance to a top surface ofthe object.
 2. The probe apparatus of claim 1, wherein the control unitcalculates as the current overdriving amount the difference between afirst distance measured by the distance measuring devices when theobject on the mounting table starts to contact with the probes and asecond distance measured by the distance measuring devices when themounting table is overdriven.
 3. A method for correcting a contactposition by correcting an overdriving amount of a mounting table tobecome same as a preset overdriving amount while electricalcharacteristics of an object to be tested on the mounting table aretested by bringing the object into electrical contact with a pluralityof probes of a probe card by overdriving the mounting table, the methodcomprising: bringing the object on the mounting table into contact withthe probes of the probe card; calculating a current overdriving amountin overdriving the mounting table; comparing the current overdrivingamount with the preset overdriving amount; and correcting the currentoverdriving amount to become same as the preset overdriving amount basedon the comparison result, wherein the step of calculating the currentoverdriving amount includes: calculating as a first distance a distanceto a top surface of the object when the object on the mounting tablestarts to contact with the probes; calculating as a second distance adistance to the top surface of the object when the mounting table isoverdriven; and calculating as the current overdriving amount adifference between the first distance and the second distance.